| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment apparatus whose cost is drastically reduced. SOLUTION: The vacuum treatment apparatus has a plurality of pressure-reducible reaction apparatuses where objects to be treated are placed, gas supply means for supplying necessary gases to the respective reaction apparatuses, high-frequency power applying means, and an exhaust means for making exhaust piping after passing through the respective reaction apparatus confluent and for exhausting the gases, and simultaneously treats the objects in the respective reaction apparatuses. The exhaust piping before the confluence and after the passage through the reaction apparatus is provided with exhaust conductance control means and the number of the exhaust piping provided with the exhaust conductance control means is smaller than the total number of the exhaust piping before the confluence. COPYRIGHT: (C)2004,JPO
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