| 摘要 |
PROBLEM TO BE SOLVED: To provide a patterning apparatus using an ink jet head which is so structured as to draw a fine pattern with high accuracy by reducing a droplet in size. SOLUTION: The patterning apparatus draws a pattern on the substrate 4 with the ink jet head 1 by making ink droplets 2, 11, 12, and 14 discharged from the ink jet head 1 impinge on the substrate 4. The ink droplets discharged from the ink jet head 1 arranged in the atmospheric pressure are made to pass through reduced-pressure regions 3, 21, and 20 whose pressures are lower than the atmospheric pressure, impinge and attach to the substrate 4. COPYRIGHT: (C)2004,JPO
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