发明名称 LIQUID EJECTION DEVICE, LIQUID MATERIAL PRODUCTION METHOD, FILM FOAMATION METHOD, AND ORGANIC ELECTROLUMINESCENT DEVICE PRODUCTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a liquid ejection device wherein a gaseous component causing disadvantages in ejecting a liquid material is removed, to provide a liquid material production method, to provide a film formation method, and to provide an organic electroluminescent device production method. SOLUTION: The liquid ejection device comprises a pretreatment section R which has a deaeration mechanism that deaerates a liquid material 71, an ejection section 20 that ejects the liquid material 71 by transforming an electrical signal into a pressure at which the liquid material is ejected into the liquid material treated in the pretreatment section R, and a first transport section 31b for transporting the liquid material from the treatment section R to the ejection section 20. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004130214(A) 申请公布日期 2004.04.30
申请号 JP20020297161 申请日期 2002.10.10
申请人 SEIKO EPSON CORP 发明人 KUWASHIRO SHINGO;TANABE SEIICHI
分类号 H05B33/10;B05C5/00;B05C11/10;H01L51/50;H05B33/14;(IPC1-7):B05C11/10 主分类号 H05B33/10
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