| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent division lines due to overlap misalignment and variations in exposure luminance at seams of division from being visually recognized during display of a liquid crystal display device by diminishing the differences in exposure energy in the seams of boundary portions between exposure shots to be stepwise carried out. <P>SOLUTION: Exposure regions 103 and light shielding regions 104 are arranged within one reticle in such a manner that the exposure regions and light shielding regions repeat alternately longitudinally and transversely. A substrate is subjected to stepping exposure by using such reticle. In such a case, the regions to be exposed by the respective shots A to M in the boundary portions of the reticle to be exposed undergo the stepping exposure so as not to be contiguous with one another and therefore the illuminance differences between the respective shots are mitigated and the differences in the result by the luminance differences of the shot boundaries are mitigated, so that the differences is not visible to the human eyes. <P>COPYRIGHT: (C)2004,JPO |
