| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for resolution evaluation of an optical apparatus such as an electronic camera and a scanner, which is hardly vulnerable to the mechanical vibration of the optical apparatus. SOLUTION: The resolution evaluation method includes the steps of: selecting the edges of a pattern drawn on an original; obtaining the distribution of luminance values near the edges of the pattern by a plurality of lines; obtaining the edge coordinates of each of a plurality of the lines; obtaining the inclination of the edges at the edge coordinates of at least one line among the plurality of lines; selecting measured data from the distribution of the linearly measured luminance values at each prescribed interval, obtaining the difference between the measured data adjacent to each other and obtaining discrete difference data; applying Fourier transform to the discrete difference data to obtain a plurality of modulation transfer functions; and evaluating the resolution on the basis of the plurality of modulation transfer functions. COPYRIGHT: (C)2004,JPO |
