| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying method of a semiconductor device manufacturing process, capable of enhancing the operating efficiency of a semiconductor manufacturing device, and is capable of reducing the production TAT. SOLUTION: A process end notice signal for noticing beforehand a process end of a semiconductor wafer to be processed by a processing device is notified from the processing device to a control computer, and after the process end notice signal has been notified, the presence of the non-processed semiconductor wafers is retrieved, in the processing device in a stocker by the control computer. When the non-processed semiconductor wafer is present in the stocker, the processing device notifies the first moving instruction of moving a conveying car to the processing device by way of the stocker; and when a wafer is not in the stocker, a second moving instruction of moving the conveying car to the processing device which does not go by way of the stocker is notified from the control computer to a conveying car controller. Further, the conveying car controller moves the conveying car to the processing device, on the basis of the process end notice signal and the first or second instruction for moving. COPYRIGHT: (C)2004,JPO |
