| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle optical device and its operation method capable of improving a particle optical characteristic. SOLUTION: This device comprises generation sources 13 for generating at least one side of two lines of electric field and magnetic field. The generation sources 13 constituting the respective lines have symmetry surfaces S and S', and are periodically arranged separately from one another so as to be set symmetrical with respect to the symmetry surfaces. At least one of the electric field and the magnetic field has a component displaceable in the x-direction. In order to generate at least one of the electric field and the magnetic field like that, an intensity pattern satisfying an equation of F<SB>1</SB>(x)=F<SB>m</SB>(x)+F<SB>c</SB>(x) is applied to the generation sources. In the equation, F<SB>m</SB>is a component without substantially depending on displacement x<SB>0</SB>, and F<SB>c</SB>is a correction component depending on x<SB>0</SB>. COPYRIGHT: (C)2004,JPO
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