| 摘要 |
PROBLEM TO BE SOLVED: To provide a slot plate for bearing substrate in which friction with a substrate can be reduced. SOLUTION: With regard to the slot plate 10 for bearing substrate and the substrate cassette using the slot plate 10, the slot plate 10 includes one resin plate 11 and at least two metal rods. A plurality of shelf pieces 15 extend while being spaced apart from the surface of the resin plate 11 by a specified gap. The shelf piece 15 is an inclining surface and a plurality of protrusions 151 extend from the free end of the shelf piece 15. A frame locks at least a pair of shelf pieces 15 to form a cassette for containing glass substrates. Since the shelf piece 15 of the substrate bearing slot plate 10 is inclining, only the side edge of the substrate is born and the shelf pieces 15 support the side edge of the substrate only at the protrusions 151 thus reducing the possibility of generating dust, e.g. wear debris, through friction. COPYRIGHT: (C)2004,JPO |
