| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid metal micro-switch used for a high-frequency microcircuit, which excels in reliability and shieldability. SOLUTION: In the micro-switch 110, two or more cavities 115, a main channel 120, and subchannels 125 communicating the cavity with the main channel are formed by a semiconductor process, etc. In two or more cavities 115, heaters 100 are installed and the cavities are filled up with inert gas. Liquid metals 130 such as mercury are enclosed in the main channel 120. In the main channel 120, two or more microswitch contacts, not illustrated in figures, are installed. When the micro-switch is heated by electrifying either of the heaters 100, the inert gas is expanded and moves the liquid metals 130 in the main channel 120, so that conduction/non-conduction states between the microswitch contacts are changed. COPYRIGHT: (C)2004,JPO
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