| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet ceramic heater superior in temperature uniformity within surface. SOLUTION: This is the sheet ceramic heater constructed of a heating element circuit 3 wiring formed on the ceramic substrate 2 and a heating object mounting side surface ceramic layer arranged on its surface. The heating object mounting side surface ceramic layer is made of two layers of ceramic layers 4, 5 and a temperature equalizer layer 5 clipped by these. This temperature equalizer layer 5 can be formed by using a material having superior heat conductivity such as tungsten, and can be formed by paste printing method or pasting of a foil, board, or mesh or the like. COPYRIGHT: (C)2004,JPO
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