STATIC AND KINETIC PRESSURE DETECTING SENSOR

摘要

PROBLEM TO BE SOLVED: To solve the problem that static pressure and kinetic pressure can not have been highly accurately detected by the same pressure sensor. SOLUTION: The static and kinetic pressure detecting sensor is provided with a fixed substrate 13 having a first electrode 11 formed on one surface and a second electrode 12 formed on the other surface; a diaphragm 15 made of an insulating material having a third electrode 14 formed on one surface; and an adhesion layer 16 at least in one circumferential edge part of the second electrode 12 and the third electrode 13 and is constituted by joining the fixed substrate 13 to the diaphragm 15 in such a way that the second electrode 12 is opposed to the third electrode 14. Since it is possible to detect static pressure by the electrostatic capacitance between the second electrode 12 and the third electrode 13 and vibrations by a voltage generated between the first electrode 11 and the second electrode 12, it is possible to highly accurately detect static pressure and kinetic pressure by one sensor. COPYRIGHT: (C)2004,JPO