摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic discharge measuring device capable of measuring a discharge voltage of a device received from a metal and a charged body of insulating material. SOLUTION: The electrostatic discharge measuring device measures the discharge voltage by reproducing, in a pseudo state, the discharge voltage received by the device when the static electricity of the charged body is discharged to the device. The device is provided with an electric circuit 14, wherein an impedance output to a ground electrode 13 from an electrode 3, to which the static electricity is input, is substantially equal to an input impedance of the device. The device is further provided with measuring devices 8 and 9 for measuring the discharge voltage applied to the electrode 3. One or more pseudo devices having an impedance previously matched with the input impedance of a typical device is further provided, and the pseudo device corresponding to the device subjected to the static electricity control is selectively used for the electric circuit. COPYRIGHT: (C)2004,JPO
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