COOLING APPARATUS FOR MODULE RAM HANDLER

摘要

PURPOSE: A cooling apparatus for a module RAM handler is provided to compensate heat generation efficiently as to a module RAM using a prolonged nozzle and a plurality of sensors. CONSTITUTION: According to the cooling apparatus for a module RAM handler, a nozzle tank(220) is installed between guide frames and has a plurality of prolonged nozzles(230). A temperature sensing sensor(240) is installed on a part of the nozzles, and controls an air temperature. A sensor(250) for sensing temperature of a module RAM is installed on the module RAM and senses the temperature of the module RAM. A temperature controller(330) is connected to the air temperature sensing sensor and the module RAM temperature sensing sensor. A control valve(340) is connected to the temperature controller. And a heat exchanger(350) is connected to the control valve and is connected to the nozzle tank.