| 摘要 |
PROBLEM TO BE SOLVED: To uniformly form an insulating resin film for protecting an electrode film set within grooves of a piezoelectric ceramic substrate. SOLUTION: In a state while a PZT substrate 1 having the grooves 2 formed is fitted to a horizontal rotary plate 23 so that a groove-formed face 1A faces the rotation center of the horizontal rotary plate 23, an insulating resin solution is applied to the groove-formed face 1A of the PZT substrate 1. Then, the horizontal rotary plate 23 is rotated. The insulating resin solution is sent into the grooves 2 of the PZT substrate 1 by a centrifugal force generated by the rotation, whereby the insulating resin film for covering the electrode film is formed uniformly. After the insulating resin solution is coated by the centrifugal force, a rotary body is rotated in a state while the PZT substrate 1 is fitted to the horizontal rotary plate so that a rear face side of the groove-formed face 1A faces the rotation center of the rotary body, whereby an excess insulating resin solution is removed by a centrifugal force generated by the rotation. COPYRIGHT: (C)2004,JPO
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