| 摘要 |
PURPOSE: A load board for inspecting a semiconductor device is provided to reduce remarkably a connecting period between a first terminal of a DUT(Device Under Test) support member and a second terminal of a connection member by using a connecting pin with a predetermined form. CONSTITUTION: A load board includes a DUT(1) for loading a semiconductor device-to-be inspected, a disc type DUT support member(2), and a connecting member(3) for connecting an arbitrary inspection apparatus with the DUT support member. A pair of circular lines are installed between the DUT support member and the connecting member. One is a ground line(4) and the other is power source line(5). Each of the DUT support member, the connecting member, and the pair of circular lines has a plurality of terminals. Each terminal has a desired form, so that a connecting pin(6) with a predetermined form is capable of being attached or detached to or from the terminal.
|
