| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a rear face incident imaging sensor for preventing lowering of spatial resolution and removing the influence of stray light. <P>SOLUTION: At the surface side of a monocrystal silicon substrate 11, a drive circuit for driving a photoelectric conversion part 12, and an electric circuit 13 for processing a signal from the photoelectric conversion part, are arranged to be separated from a prescribed distance D in the horizontal direction from an opening 20. Consequently, the influence of the stray light is removed. In addition, a semiconductor substrate has substantially small lowering of the spatial resolution for having a high refraction factor, and is further improved by be thinning. <P>COPYRIGHT: (C)2004,JPO</p> |
