| 摘要 |
PURPOSE: A multi-dressing chuck table is provided to perform accurately a dressing process and improve the operating speed by fixing stably a dressing board on a chuck table. CONSTITUTION: A multi-dressing chuck table includes a bottom plate(10), a top plate(20), and an air distribution unit. A plurality of main absorbing holes(11) are formed on the bottom plate(10). The top plate(20) is combined with the bottom plate. A plurality of sub-absorbing holes(21) are arranged on a left side, a right side, an upper side, and a lower side of the top plate. The air distribution unit is installed between the top plate and the bottom plate. The air distribution unit is formed with a first air distributor(31), a second air distributor(32), and a third air distributor(33). The first air distributor(31) is installed on the main absorbing holes(11). The second air distributor(32) is connected to the first air distributor(31) through a connection tube(41). A plurality of absorbing holes(42) are formed on an upper surface of the second air distributor. The third air distributor is installed on the second air distributor. A plurality of inflow holes(43) corresponding to the absorbing holes(42) are formed on the third air distributor(33).
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