SETUP TECHNIQUE FOR INSPECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a technique for efficiently setting up a system for inspecting, measuring and reviewing operations regarding semiconductor wafers.

SOLUTION: In the technique, a recipe for allowing each system to accurately inspect the semiconductor wafer is set up. Related information from a tools is collected, and information is presented to a user so that a time required for completing the recipe is significantly shortened. The embodiment of a system includes a review station, linked in a state that communication can be made so that an inspection system and the review station can perform read and write from and to an entire data set stored in the inspection system. The data set contains characteristic image files detected by the inspection system.

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