发明名称 FILTER PROTECTION DEVICE FOR PREVENTING DAMAGE OF FILTER
摘要 PURPOSE: An air filter protection device is provided which reduces maintenance cost of air filter and maintains high cleanliness more stably inside a unit process cell by fundamentally preventing damage of the air filter of clean room. CONSTITUTION: The filter protection device(900) for preventing damage of filter comprises a frame(100) which is formed in a shape corresponding to a filter fixing part for fixing an air filtering filter, and in which an inner space(110) divided with the circumference by a closed curved line is formed; an adhesion means(200) for adhering the frame to the filter fixing part; and a filter protection mesh(300) which is positioned in such a way that the filter protection mesh is filled in the inner space with the filter protection mesh being fixed to the inner surface of the frame, and formed in a net comprising a plurality of fine holes so that the filter protection mesh protects the filter from an external impact as air that passes through the filter is passing through the filter protection mesh, wherein the frame is formed in a rectangle comprising a pair of first members(120) positioned with being parallel to each other in a length direction, and a pair of second members(130) positioned with being parallel to each other in a width direction perpendicular to the length direction, the frame further comprises a moving member(150) arranged along a width direction of the frame and moved as long as a certain distance in a length direction of the frame, and the adhesion means is movable according to movement of the moving member with being fixed to the moving member.
申请公布号 KR20040036453(A) 申请公布日期 2004.04.30
申请号 KR20020065650 申请日期 2002.10.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HWANG, JEONG SEONG;KIM, DAE WON;KIM, TAE HYEOP
分类号 B01D46/00;B01D46/42;(IPC1-7):B01D46/00 主分类号 B01D46/00
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