Verfahren und Gerät zum Ionenstrahltransport,申请号DE19976028197-传众专利搜索

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发明名称	Verfahren und Gerät zum Ionenstrahltransport
摘要
申请公布号	DE69728197(D1)	申请公布日期	2004.04.29
申请号	DE19976028197	申请日期	1997.01.17
申请人	AXCELIS TECHNOLOGIES, INC.	发明人	BENVENISTE, VICTOR MAURICE;CHEN, JIONG;HORSKY, THOMAS NEIL;REYNOLDS, WILLIAM EDWARD
分类号	C23C14/48;H01J37/30;H01J37/317;H01L21/265;(IPC1-7):H01J37/30;H01J37/02	主分类号	C23C14/48
代理机构		代理人
主权项
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