| 发明名称 |
TEMPERATURE CONTROL APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| 摘要 |
PURPOSE: A temperature control apparatus is provided to exactly measure temperature by measuring the temperature using an optical sensor. CONSTITUTION: A temperature control apparatus includes a measurement object substance(100) for measuring temperature, a cylindrical body(206) attached to the measurement object substance, and an optical sensor(204). The optical sensor(204) is formed at the center portion of the cylindrical body(206) for measuring the temperature of the measurement object substance(100). The cylindrical body(206) is composed of Teflon material.
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| 申请公布号 |
KR20040034846(A) |
申请公布日期 |
2004.04.29 |
| 申请号 |
KR20020063476 |
申请日期 |
2002.10.17 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SON, SEONG GUK |
| 分类号 |
H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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