| 摘要 |
Provided for herein is a temperature sensor and methods of making and using the same. In one embodiment, the temperature sensor comprises: a cover plate disposed at a first end of a substrate to form an interface portion; a sensing element disposed between the cover plate and the substrate to form an assembly; wherein the cover plate and substrate have relative dimensions so as to form a ledge at the first end; and wherein the cover plate is attached to the substrate at the ledge. In anther embodiment, the temperature sensor comprises: a cover plate disposed at a first end of a substrate to form an interface portion, a sensing element disposed between the cover plate and the substrate to form an assembly, and a seal disposed to inhibit fluid communication between the sensing element a gas to be temperature sensed, wherein fluid communication is retained between the sensing element and an external environment.
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