SPINNER APPARATUS MOUNTED SPRAY SENSOR AT END POINT OF NOZZLE

摘要

PURPOSE: A spinner apparatus is provided to exactly sense error of a substrate by mounting a spray sensor at end point of a nozzle. CONSTITUTION: In a spinner apparatus, a chemical(30) is sprayed to a substrate(10) rotated by a chuck(20) using a nozzle(35). The spinner apparatus is operated by a desired software(50). At this time, a spray sensor(40) is mounted at end point of the nozzle(35). The spray sensor(40) exactly senses the spray time and the spray position in accordance with a recipe(55) in the software.