| 发明名称 |
Polishing pad with window |
| 摘要 |
Polishing pads with a window, systems containing such polishing pads, and processes that use such polishing pads are disclosed.
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| 申请公布号 |
US2004082287(A1) |
申请公布日期 |
2004.04.29 |
| 申请号 |
US20020282730 |
申请日期 |
2002.10.28 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WRIGHT JASON R.;WISWESSER ANDREAS NORBERT;SWEDEK BOGUSLAW A. |
| 分类号 |
B24D99/00;(IPC1-7):B24D17/00 |
主分类号 |
B24D99/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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