APPARATUS FOR TRANSFERRING SEMICONDUCTOR WAFER

摘要

PURPOSE: An apparatus for transferring a semiconductor wafer is provided to prevent the contamination of a wafer by restricting the discharge of particles to the outside of a casing. CONSTITUTION: An apparatus for transferring a semiconductor wafer includes a casing(10), a transfer unit, a connection unit(40), and a shielding unit(60). The casing(10) includes a guide slot, which is formed along a transferring path of a wafer support block(20). A partial region of the wafer support block(20) penetrates the guide slot. The transfer unit is installed within the casing in order to transfer the wafer support block. The connection unit(40) is used for connecting the transfer unit to the wafer support block. The shielding unit(60) is installed within the casing in order to shield the transfer unit from the guide slot except for a partial region of the connection unit.