发明名称 |
Method of forming catalyst nanoparticles for nanowire growth and other applications |
摘要 |
Methods for forming a predetermined pattern of catalytic regions having nanoscale dimensions are provided for use in the growth of nanowires. The methods include one or more nanoimprinting steps to produce arrays of catalytic nanoislands or nanoscale regions of catalytic material circumscribed by noncatalytic material.
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申请公布号 |
US2004082178(A1) |
申请公布日期 |
2004.04.29 |
申请号 |
US20020281678 |
申请日期 |
2002.10.28 |
申请人 |
KAMINS THEODORE I.;KUEKES PHILIP J.;CHEN YONG |
发明人 |
KAMINS THEODORE I.;KUEKES PHILIP J.;CHEN YONG |
分类号 |
C30B11/00;C30B11/12;(IPC1-7):H01L21/302 |
主分类号 |
C30B11/00 |
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