发明名称 Method of forming catalyst nanoparticles for nanowire growth and other applications
摘要 Methods for forming a predetermined pattern of catalytic regions having nanoscale dimensions are provided for use in the growth of nanowires. The methods include one or more nanoimprinting steps to produce arrays of catalytic nanoislands or nanoscale regions of catalytic material circumscribed by noncatalytic material.
申请公布号 US2004082178(A1) 申请公布日期 2004.04.29
申请号 US20020281678 申请日期 2002.10.28
申请人 KAMINS THEODORE I.;KUEKES PHILIP J.;CHEN YONG 发明人 KAMINS THEODORE I.;KUEKES PHILIP J.;CHEN YONG
分类号 C30B11/00;C30B11/12;(IPC1-7):H01L21/302 主分类号 C30B11/00
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