Central chamber for universal module manufacturing and test processes has connection surfaces with openings into processing chamber and arrangements for attaching processing unit

摘要

The central chamber has at least one wall element with at least one connection surface (33) and a cover element joined together, a processing chamber (40) for a workpiece to be processed and a processing unit for association with the wall element or cover element. Each connection surface has an opening (41) into the processing chamber and an arrangement (43,55) for attaching a processing unit. AN Independent claim is also included for the following: a processing station with at least one process module and a building block system for optical processing of workpieces.