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发明名称
THIN FILM TRANSISTORS AND SEMICONDUCTOR DEVICE
摘要
申请公布号
SG103296(A1)
申请公布日期
2004.04.29
申请号
SG20010003453
申请日期
2001.06.11
申请人
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人
SHUNPEI YAMAZAKI;TORU MITSUKI;KENJI KASAHARA;TAKETOMI ASAMI;TAMAE TAKANO;TAKESHI SHICHI;CHIHO KOKUBO;YASUYUKI ARAI
分类号
H01L21/336;H01L29/786;(IPC1-7):H01L21/205
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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