发明名称 |
Vorrichtung und Verfahren zum Isolieren und Messen einer Bewegung in einer messtechnischen Vorrichtung |
摘要 |
A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions. |
申请公布号 |
DE10296461(T5) |
申请公布日期 |
2004.04.29 |
申请号 |
DE2002196461T |
申请日期 |
2002.03.08 |
申请人 |
VEECO INSTRUMENTS INC., WOODBURY |
发明人 |
MASSIE, JAMES R.;PROKSCH, ROGER B. |
分类号 |
G01B11/00;G01B5/28;G01B21/00;G01B21/30;G01D5/26;G01Q10/02;G01Q10/04;G01Q30/06;G01Q30/20;G01Q70/02 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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