METHOD FOR FABRICATING BROADBAND WDM UNIT USING MULTI-THIN FILM DEPOSITION TYPE PLANAR WAVEGUIDE

摘要

PURPOSE: A method for fabricating a broadband WDM unit using a multi-thin film deposition type planar waveguide is provided to improve the performance and enhance the productivity by integrating multi-thin film filters on the planar waveguide. CONSTITUTION: A bottom clad layer(2) is formed by depositing a silica glass film on a silicon substrate. A core layer is formed by depositing silica particles on the bottom clad layer(2). A dry-etch mask is formed on the core layer. An organic photo-resist layer is formed on the dry-etch mask. A photo-mask is transferred on the photo-resist layer and the dry-etch mask by using a photolithography method and a wet-etch method. A channel waveguide(5) is formed by etching the core layer. A top clad silica particle layer(6) is deposited thereon. A particular position of a planar waveguide is cut by using an electronic saw. A cut part of the planar waveguide is processed. The roughness of the planar waveguide is removed by performing a lateral process. A high-refractive index film(9) and a low-refractive index film(8) are deposited on a lateral part of the cut waveguide.