发明名称 |
Valve unit and fluid control chip |
摘要 |
A valve unit and a fluid control chip include: a valve chamber having an inlet and an outlet for a fluid; a valve element accommodated in the valve chamber; a piezoelectric element for applying vibrations to the valve chamber; and a driver for driving the piezoelectric element, wherein the piezoelectric element varies the opening by varying a frequency and/or an amplitude of the vibration applied to the valve chamber and by varying the amplitude of the valve element by the varied vibration.
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申请公布号 |
US2004079424(A1) |
申请公布日期 |
2004.04.29 |
申请号 |
US20030684420 |
申请日期 |
2003.10.15 |
申请人 |
TAKEDA MASATOSHI;NAKANO KENICHI;YAMAUCHI KAZUHIRO |
发明人 |
TAKEDA MASATOSHI;NAKANO KENICHI;YAMAUCHI KAZUHIRO |
分类号 |
F15C5/00;F16K31/00;F16K99/00;(IPC1-7):F16K31/02 |
主分类号 |
F15C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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