PROBE DEVICE THAT CONTROLS TEMPERATURE OF OBJECT TO BE INSPECTED AND PROBE INSPECTION METHOD

摘要

A probe device (100) used to inspect an object to be inspected under controlled temperature. The probe device comprises a stage base (2), a Z stage (10), an X-Y stage (12) having a frame structure, a substrate fixing mechanism (23) provided on the X-Y stage, a probe card (14) provided so as to be opposed to the substrate fixing mechanism, and a probing stage (3) fixed on the Z stage and provided in the frame structure of the X-Y stage so that the axis of the probing stage corresponds to a line vertically extended from the center of a probe of the probe card. The probing stage is provided with a temperature control device for heating and cooling an object to be inspected and with a probing lifting mechanism. The probing stage supports a substrate object to be inspected from its bottom and controls the temperature of the object to be inspected.