发明名称 INTEGRATED GAS VALVE
摘要 <p>An integrated gas valve (1) formed so that a turbulent flow portion is not produced in carrying gas and that process gas flowed in the carrying gas is not diffused, comprising first flow passages (26) in which open/close valves (30) allowing valve elements (33) to be brought into contact with and separated from valve seats (34) by an actuator (31) to communicate and cut out valve holes (35) with and from valve chambers (36) are formed through a valve body (12) so as to be branched midway from the valve holes (35) and a second flow passage (29) formed in the valve body (12) to communicate input ports to the valve chambers, wherein the plurality of open/close valves are continuously arranged with each other in one row to form a main flow passage (23) in which the first flow passages (26) are directly connected to each other or connected in series through a connection flow passage (27) and the second flow passages (39) of the open/close valves are connected to the main flow passage (23) through the valve chambers (36) and the valve holes (35).</p>
申请公布号 WO2004036099(A1) 申请公布日期 2004.04.29
申请号 WO2003JP13216 申请日期 2003.10.15
申请人 CKD CORPORATION;SONY CORPORATION;YOSHIDA, KAZUHIRO;INOUE, TAKASHI;MITOMO, JUGO;NARUI, HIRONOBU 发明人 YOSHIDA, KAZUHIRO;INOUE, TAKASHI;MITOMO, JUGO;NARUI, HIRONOBU
分类号 F16K27/00;F16K31/06;(IPC1-7):F16K27/00 主分类号 F16K27/00
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