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发明名称
HYBRID ALIGNMENT MARKS FOR OPTIMAL ALIGNMENT OF THREE-DIMENSIONAL LAYERS
摘要
申请公布号
SG103251(A1)
申请公布日期
2004.04.29
申请号
SG19990006402
申请日期
1999.12.17
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING LTD
发明人
SAJAN, MAROKKEY RAPHAEL;ALEX CHENG TSUN-LUNG
分类号
G03F9/00;(IPC1-7):G03F9/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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