发明名称 System and method for clamping a device holder with reduced deformation
摘要 A stage assembly (224) for moving and positioning a device (300) includes a device table (308), a device holder (312) that retains the device (300), and a stage mover assembly (204). In some embodiments, the stage assembly (224) allows precise rotation of the device (300) between a first position and a second position. Additionally, the stage assembly (224) can include a lock assembly (342) that selectively locks the device holder (312) to the device table (308) without influencing the flatness of the device (300) and without deflecting and distorting the device holder (312) and the device (300).
申请公布号 US2004080730(A1) 申请公布日期 2004.04.29
申请号 US20020282692 申请日期 2002.10.29
申请人 BINNARD MICHAEL 发明人 BINNARD MICHAEL
分类号 G03B27/42;G03F7/20;(IPC1-7):G03B27/42 主分类号 G03B27/42
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