PLASMA VACUUM CHAMBER

摘要

PURPOSE: A plasma vacuum chamber is provided to improve a combination structure of a top chamber to a heater block by forming a concave part and a convex part on the top chamber and the heater block, respectively. CONSTITUTION: A plasma vacuum chamber includes a bar-shaped combination block, a heater block(503), and a top chamber(501). The bar-shaped combination block is fixed to one end of the top chamber(501) and one end of a bottom chamber(502). The bar-shaped combination block is projected from a surface of the top chamber(501). The heater block(503) is installed on the top chamber. An insertion groove is formed at a lower side of the heater block. A combination member(505) is formed at a side part of the heater block. A groove is formed at one side of the top chamber. The groove of the top chamber is inserted into the combination member(505) of the heater block.