| 摘要 |
[Object] To reduce the amounts of cleaning liquids and rinse liquid used, as well as the energy consumption. [Means for solution] A cleaning head 12 has a plurality of cleaning units 50 and a drying unit 60. An organic substance cleaning portion 52 of each cleaning unit 50 blows a first cleaning agent 68 selectively over a portion to be cleaned of a substrate 100, and sucks reaction products etc. through a first suction mouth 72. An inorganic substance cleaning portion 54 blows a second cleaning agent 74 over the portion to be cleaned of the substrate from which organic substance have been removed, and sucks reaction products etc. through a second suction mouth. A rinse portion 56 blows pure water 82 the portion of the substrate 100 from which inorganic substance have been removed, and sucks its vapor through a third suction mouth 88. The drying unit 60 dries the substrate 100 by blowing out a heated gas 90 from a hot wind blowing-out mouth 61. A light guide 62 illuminates the portion to be cleaned of the substrate with ultraviolet light 92, and thereby decomposes residual organic substances.
|
