| 发明名称 |
Process parameter event monitoring system and method for process |
| 摘要 |
A system and method for measuring process parameters in a process machine is described. The system is synchronized to the operation of the process machine so that spurious process parameters events are filtered out.
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| 申请公布号 |
US2004082083(A1) |
申请公布日期 |
2004.04.29 |
| 申请号 |
US20020282771 |
申请日期 |
2002.10.28 |
| 申请人 |
KRAZ VLADIMIR;MARTIN KIRK ALAN |
发明人 |
KRAZ VLADIMIR;MARTIN KIRK ALAN |
| 分类号 |
G01R31/18;H01L21/00;(IPC1-7):H01L21/66;G01R31/26 |
主分类号 |
G01R31/18 |
| 代理机构 |
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