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发明名称
Doppelgatetransistor und Herstellungsverfahren
摘要
申请公布号
DE10296953(T5)
申请公布日期
2004.04.29
申请号
DE20021096953T
申请日期
2002.06.06
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
BRYANT, ANDRES;IEONG, MEIKEI;MULLER, K. PAUL;NOWAK, EDWARD J.;FRIED, DAVID M.;RANKIN, JED
分类号
H01L21/336;H01L21/8238;H01L27/092;H01L29/49;H01L29/78;H01L29/786;(IPC1-7):H01L29/49;H01L21/28
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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