| 摘要 |
In an embodiment of the present invention, the same provides an edge sensor capable of locating an edge under a substrate. The edge sensor comprises a radiation source, a scanner, a microprocessor, and an indicator. The radiation source emits photons that are scattered back to the direction of the radiation source. The scanner measures the count rate or the amount of radiation back scattered by the substrate along a line on the substrate. After a series of count rates have been measured at various points along a line on the substrate that data is received and the microprocessor calculates a response function centroid which is the position of the edge. The indicator indicates the edge position.
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