Ink-jet printhead and method for manufacturing the same

摘要

An ink-jet printhead comprises a substrate (100) including an ink chamber, a manifold (102) for supplying ink, and an ink passage; and a nozzle plate (114) including a nozzle (104), and an electrode electrically connected to a heater (108). An ink-jet printhead comprises a substrate on which an ink chamber filled with ink to be ejected is formed on its surface, a manifold for supplying ink to the ink chamber is formed on a rear surface of the substrate, and an ink passage for connecting the ink chamber to the manifold is formed parallel to the surface of the substrate; and a nozzle plate stacked on the substrate, in which a nozzle through which ink is ejected from the ink chamber is formed, with which a heater and an electrode electrically connected to the heater, for applying current to the heater, are arranged. An independent claim is also included for manufacturing an ink-jet printhead comprising forming a sacrificial layer having a predetermined depth on a surface of a substrate; stacking a nozzle plate on the surface of the substrate on which the sacrificial layer is formed, arranging a heater and an electrode electrically connected to the heater on the nozzle plate, and exposing the sacrificial layer by forming a nozzle in the nozzle plate; forming a manifold on a rear surface of the substrate; forming an ink chamber and an ink passage by etching the sacrificial layer exposed through the nozzle; and connecting the manifold to the ink passage.