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发明名称
Ion sources
摘要
申请公布号
GB0406882(D0)
申请公布日期
2004.04.28
申请号
GB20040006882
申请日期
2004.03.26
申请人
APPLIED MATERIALS INC
发明人
分类号
H01J37/08;H01J37/32
主分类号
H01J37/08
代理机构
代理人
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