Abrasive machine and method of abrading work piece

摘要

The machine has a slurry feeding unit (60) for pressurizing and feeding slurry through the slurry holes (48) formed on an upper abrasive plate (10). Slurry paths (112) respectively connect the slurry holes to the slurry feeding unit. Several valve mechanisms (70) are respectively provided to the slurry paths to control slurry flow. A controller (71) regulates the valve mechanisms. A workpiece (20) is sandwiched between the upper abrasive plate and a lower abrasive plate (12) so as to abrade both faces of the workpiece. The upper and lower abrasive plates rotate to abrade the upper and lower faces of the workpiece. An independent claim is included for the use method of the abrasive machine to abrade a workpiece.