发明名称 |
Laser machining |
摘要 |
<p>A silicon body W is machined with a UV or green laser beam 6 in a refrigerated halocarbon environment. Local heating with the laser beam of the halocarbon in the vicinity of a machining location is sufficient to cause a chemical reaction between the silicon body and the halocarbon which accelerates machining, enhances machining quality and reduces laser machining generated debris.</p> |
申请公布号 |
GB2394436(A) |
申请公布日期 |
2004.04.28 |
申请号 |
GB20020024585 |
申请日期 |
2002.10.22 |
申请人 |
* XSIL TECHNOLOGY LIMITED |
发明人 |
ADRIAN * BOYLE;MARIA * FARSARI |
分类号 |
B23K26/12;B23K26/40;H01L21/3065;(IPC1-7):B23K26/12 |
主分类号 |
B23K26/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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