Antenna arrangement and plasma processing apparatus with such an arrangement,申请号EP20020756544-传众专利搜索

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发明名称	Antenna arrangement and plasma processing apparatus with such an arrangement
摘要
申请公布号	EP1412963(A2)	申请公布日期	2004.04.28
申请号	EP20020756544	申请日期	2002.07.18
申请人	LAM RESEARCH CORPORATION	发明人	WILCOXSON, MARK, H.;BAILEY, III, ANDREW, D.;KUTHI, ANDRAS;SMITH, MICHAEL, G.R.;SCHOEPP, ALAN, M.
分类号	H05H1/46;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32	主分类号	H05H1/46
代理机构		代理人
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