Illumination system,particularly for deep ultraviolet lithography,申请号EP19990106348-传众专利搜索

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发明名称	Illumination system,particularly for deep ultraviolet lithography
摘要
申请公布号	EP0955641(B1)	申请公布日期	2004.04.28
申请号	EP19990106348	申请日期	1999.03.27
申请人	CARL ZEISS	发明人	SCHULTZ, JOERG;WANGLER, JOHANNES;SCHUSTER, KARL-HEINZ;DINGER, UDO
分类号	F21V5/00;F21V7/00;F21V13/04;G03F7/20;G21K1/06;G21K5/00;G21K5/02;H01L21/027;(IPC1-7):G21K1/06	主分类号	F21V5/00
代理机构		代理人
主权项
地址

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