Image sensor having micro-lenses with integrated color filter and method of making

摘要

An image sensor comprises pixels formed in a semiconductor substrate, and color filter material formed over the light sensitive element. Each pixel includes a light sensitive element. The color filter material is formed in a micro-lens shape. An independent claim is also included for a method of forming a pixel of image sensor comprising forming a light sensitive element in semiconductor substrate, forming a color filter material over the light sensitive element, forming a spherical drop over the color filter material and over the light sensitive element, and etching the color filter material using the spherical drop as a mask, such that the color filter material becomes micro-lens shape. The spherical drop is formed from a sacrificial material.