| 发明名称 |
Piezoelectric actuator, infrared sensor and piezoelectric light deflector |
| 摘要 |
<p>The drive section 10a made by bonding the piezoelectric material 11 on part of the elastic shim 10 and the displacement amplifying section 10b which amplifies the amplitude of vibration vibrated in the drive section 10a are provided in the same plane. The device is driven at drive frequencies in a region between the resonance frequency of the drive section and the resonance frequency of the displacement amplifying section. <IMAGE></p> |
| 申请公布号 |
EP0905801(B1) |
申请公布日期 |
2004.04.28 |
| 申请号 |
EP19980118450 |
申请日期 |
1998.09.30 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
IMADA, KATSUMI;MORITOKI, KATSUNORI;MASUTANI, TAKESHI;NOMURA, KOJI;KAWAKITA, KOUJI |
| 分类号 |
G01J5/02;G01J5/34;G02B26/08;G02B26/10;H01L37/02;H01L41/09;(IPC1-7):H01L41/09 |
主分类号 |
G01J5/02 |
| 代理机构 |
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代理人 |
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