Imaging apparatus and method

摘要

An apparatus images a surface. An imager stage (20) linearly translates the surface in a first direction. A fiber optic bundle (40) has a first end (42) of parallel first fiber ends (46) defining a linear input aperture (48) perpendicular to the first direction and parallel to the surface, and a second end (44) defining a generally circular output aperture (52). Each first fiber end optically communicates with the output aperture. A radiation beam linearly scans and interacts with the surface below the input aperture (48) to produce a light signal that is collected by the input aperture and transmitted by the fiber bundle to the output aperture (52). A photodetector (98) detects the light signal at the output aperture. A processor processes the detected light.