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发明名称
LASER SPECTRAL ENGINEERING FOR LITHOGRAPHIC PROCESS
摘要
申请公布号
EP1412182(A2)
申请公布日期
2004.04.28
申请号
EP20020752300
申请日期
2002.07.11
申请人
CYMER, INC.
发明人
SPANGLER, RONALD, L.;LIPCON, JACOB, P.;RULE, JOHN, A.;JACQUES, ROBERT, N.;KROYAN, ARMEN;LALOVIC, IVAN;FOMENKOV, IGOR, V.;ALGOTS, JOHN, M.
分类号
H01S3/10;B41C;B41C1/00;G03F7/20;H01L21/027;H01S3/036;H01S3/038;H01S3/04;H01S3/041;H01S3/08;H01S3/081;H01S3/097;H01S3/0971;H01S3/0975;H01S3/102;H01S3/104;H01S3/105;H01S3/1055;H01S3/11;H01S3/13;H01S3/134;H01S3/137;H01S3/139;H01S3/22;H01S3/223;H01S3/225;(IPC1-7):B41C1/00
主分类号
H01S3/10
代理机构
代理人
主权项
地址
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